Nano-Size Phase Formation at Acoustically Stimulated Ion Beam Synthesis

V. G. Litovchenko; V. P. Melnik; B. M. Romanjuk

doi:10.15407/ujpe60.01.0064

Nano-Size Phase Formation at Acoustically Stimulated Ion Beam Synthesis

Authors

V. G. Litovchenko V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
V. P. Melnik V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
B. M. Romanjuk V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine

DOI:

https://doi.org/10.15407/ujpe60.01.0064

Keywords:

ion implantation, ultrasound excitation, defects, diffusion, nanoclusters, buried layers

Abstract

The results of researches on the interaction of accelerated ions with a solid at the in situ ultra-sonic treatment are reported. A proposed combined method of acoustically stimulated ion beam doping of solid-state targets allows one to efficiently control the redistribution of radiation-induced defects that emerge during the interaction of accelerated particles with the solid. This method makes it possible to affect the rate of quasichemical reactions in nano-sized structures, stimulate the acceleration or deceleration of mass transfer processes, and change conditions of formation, growth, and decay of phases in solid-state matrices.

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Published

2019-01-22

How to Cite

Litovchenko, V. G., Melnik, V. P., & Romanjuk, B. M. (2019). Nano-Size Phase Formation at Acoustically Stimulated Ion Beam Synthesis. Ukrainian Journal of Physics, 60(1), 64. https://doi.org/10.15407/ujpe60.01.0064

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Issue

Vol. 60 No. 1 (2015)

Section

Solid matter

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