Nano-Size Phase Formation at Acoustically Stimulated Ion Beam Synthesis

Authors

  • V. G. Litovchenko V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • V. P. Melnik V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • B. M. Romanjuk V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine

DOI:

https://doi.org/10.15407/ujpe60.01.0064

Keywords:

ion implantation, ultrasound excitation, defects, diffusion, nanoclusters, buried layers

Abstract

The results of researches on the interaction of accelerated ions with a solid at the in situ ultra-sonic treatment are reported. A proposed combined method of acoustically stimulated ion beam doping of solid-state targets allows one to efficiently control the redistribution of radiation-induced defects that emerge during the interaction of accelerated particles with the solid. This method makes it possible to affect the rate of quasichemical reactions in nano-sized structures, stimulate the acceleration or deceleration of mass transfer processes, and change conditions of formation, growth, and decay of phases in solid-state matrices.

Published

2019-01-22

How to Cite

Litovchenko, V. G., Melnik, V. P., & Romanjuk, B. M. (2019). Nano-Size Phase Formation at Acoustically Stimulated Ion Beam Synthesis. Ukrainian Journal of Physics, 60(1), 64. https://doi.org/10.15407/ujpe60.01.0064

Issue

Section

Solid matter

Most read articles by the same author(s)

1 2 > >>