Nano-Size Phase Formation at Acoustically Stimulated Ion Beam Synthesis

Authors

  • V. G. Litovchenko V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • V. P. Melnik V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • B. M. Romanjuk V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine

DOI:

https://doi.org/10.15407/ujpe60.01.0064

Keywords:

ion implantation, ultrasound excitation, defects, diffusion, nanoclusters, buried layers

Abstract

The results of researches on the interaction of accelerated ions with a solid at the in situ ultra-sonic treatment are reported. A proposed combined method of acoustically stimulated ion beam doping of solid-state targets allows one to efficiently control the redistribution of radiation-induced defects that emerge during the interaction of accelerated particles with the solid. This method makes it possible to affect the rate of quasichemical reactions in nano-sized structures, stimulate the acceleration or deceleration of mass transfer processes, and change conditions of formation, growth, and decay of phases in solid-state matrices.

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UJP 2015 V60 #1

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Published

2019-01-22

Issue

Vol. 60 No. 1 (2015)

Section

Solid matter

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How to Cite

Nano-Size Phase Formation at Acoustically Stimulated Ion Beam Synthesis. (2019). Ukrainian Journal of Physics, 60(1), 64. https://doi.org/10.15407/ujpe60.01.0064

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