Formation of Periodic Structures on the Solid Surface Under Laser Irradiation
DOI:
https://doi.org/10.15407/ujpe62.01.0020Keywords:
laser-induced periodic structures, laser annealing, temperature profile, nanocrystalsAbstract
Advances in the development of technologies aimed at the production of periodic structures on the surface of semiconductors, metals, and insulators have been reviewed. Particular attention was paid to the formation of periodic structures under laser irradiation. The results of both theoretical calculations and experimental researches of the phenomenon concerned are presented.
References
Huin Cong Tu. Ph.D. thesis Research and Development of Laser Technology for the Modification of Electrophysical Characteristics of the Silicon–Silicon Dioxide System (St.-Petersburg National Research University of Information Technologies, Mechanics and Optics, 2014) (in Russian).
O.O. Havryliuk, O.Yu. Semchuk, O.V. Steblova, A.A. Evtukh, L.L. Fedorenko, O.L. Bratus, S.O. Zlobin, M. Karlsteen. Influence of laser annealing on SiO films properties. Appl. Surf. Sci. 336, 217 (2015).
https://doi.org/10.1016/j.apsusc.2014.11.066
A. Glowacki, S.K. Brahma, H. Suzuki, C. Boit. Systematic characterization of integrated circuit standard components as stimulated by scanning laser beam. IEEE Trans. Device Mater. Rel. 7, 31 (2007).
https://doi.org/10.1109/TDMR.2007.900056
F. Beaudoin, K. Sanchez, R. Desplats, P. Perdu, J.M. Nicot, J.P. Roux, M. Otte. Dynamic laser stimulation case studies. Microelectron. Rel. 45, 1538 (2005).
https://doi.org/10.1016/j.microrel.2005.07.061
O.O. Havryliuk, O.Yu. Semchuk, O.L. Bratus, A.A. Evtukh, O.V. Steblova, L.L. Fedorenko. Study of thermophysical properties of crystalline silicon and silicon-rich silicon oxide layers. Appl. Surf. Sci. 302, 213 (2014).
https://doi.org/10.1016/j.apsusc.2013.09.171
A.V. Dvurechenskii. Pulse oriented crystallization of solids (laser annealing). Soros Obrazov. Zh. 85, 108 (2004) (in Russian).
M. Baumeister, T. Scholz, K. Dickmann, F. Vollersten. Influence of Mie-scattering on high-speed micro-perforation considering brilliant laser radiation. J. Laser Appl. 22, No. 2, 48 (2010).
https://doi.org/10.2351/1.3455821
M.A. Vasiliev, M.M. Nishchenko, P.A. Gurin. Laser modification of the surface of titanium implants. Usp. Fiz. Met. 11, 209 (2010).
https://doi.org/10.15407/ufm.11.02.209
R. Varache. Ph.D. thesis Development, Characterization and Modeling of Interfaces for High Efficiency Silicon Heterojunction Solar Cells (Technische Universit¨at Berlin, 2012).
A. Medvid, I. Dmitruk, P. Onufrijevs, I. Pundyk. Properties of nanostructure formed on SiO2/Si interface by laser radiation. Solid State Phenom. 131–133, 559 (2008).
https://doi.org/10.4028/www.scientific.net/SSP.131-133.559
A. Medvid, P. Onufrijevs, R. Jarimaviciute-Gudaitiene, E. Dauksta, I. Prosycevas. Formation mechanisms of nano and microcones by laser radiation on surfaces of Si, Ge, and SiGe crystals. Nanoscale Res. Lett. 8, 264 (2013).
https://doi.org/10.1186/1556-276X-8-264
A. Borowiec, H.K. Haugen. Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses. Appl. Phys. Lett. 82, 4462 (2003).
https://doi.org/10.1063/1.1586457
B.K. Nayak, M.C. Gupta. Ultrafast laser-induced selforganized conical micro/nano surface structures and their origin. Opt. Lasers Eng. 48, 966 (2010).
https://doi.org/10.1016/j.optlaseng.2010.05.009
V. Sava, T.L. Mitran, G. Socol, S. Antohe. Silicon surface structuring by XeCl excimer laser irradiation in atmospheric conditions. Digest J. Nanomater. Biostruct. 8, 61 (2013).
B.K. Nayak, M.C. Gupta, K.W. Kolasinski. Formation of nano-textured conical microstructures in titanium metal surface by femtosecond laser irradiation. Appl. Phys. A 90, 399 (2008).
https://doi.org/10.1007/s00339-007-4349-2
L.A. Golovan, I.O. Djun, A.E. Dokukina, S.V. Zabotnov, A.A. Ezhov, P.K. Kashkarov, N.E. Maslova, I.O. Ostapenko, V.I. Panov, V.U. Timoshenko. AFM investigation of nanoparticles formed on silicon surface by femtosecond laser pulses. Bull. Russ. Acad. Sci. Phys. 73, 39 (2009).
https://doi.org/10.3103/S1062873809010122
M. Bolle, S. Lazare. Characterization of submicrometer periodic structures produced on polymer surfaces with lowfluence ultraviolet laser radiation. J. Appl. Phys. 73, 3516 (1993).
https://doi.org/10.1063/1.352957
J.F. Young, J.S. Preston, H.M. Driel, J.E. Sipe. Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass. Phys. Rev. B 27, 1155 (1983).
https://doi.org/10.1103/PhysRevB.27.1155
F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallinich, A. Ostendorf, B.N. Chichkov. Towards nanostructuring with femtosecond laser pulses. Appl. Phys. A 77, 229 (2003).
https://doi.org/10.1117/12.498496
T.H.R. Crawford, A. Borowiec, H.K. Haugen. Femtosecond laser micromachining of grooves in silicon with 800 nm pulses. Appl. Phys. A 80, 1717 (2005).
https://doi.org/10.1007/s00339-004-2941-2
I.A. Ostapenko, S.V. Zabotnov, G.D. Shandybina, L.A. Golovan', A.V. Chervyakov, Yu.V. Ryabchikov, V.V. Yakovlev, V.Yu. Timoshenko, V.K. Kashkarov. Micro- and nanostructuring of the crystalline silicon surface under the action of femtosecond laser pulses. Izv. Ross. Akad. Nauk Ser. Fiz. 70, 1315 (2006) (in Russian).
K.E. Lapshin, A.Z. Obidin, V.N. Tokarev, V.Yu. Khomich, V.A. Shmakov, V.A. Yamshchikov. Formation of nanostructures on the silicon nitride surface under irradiation of F[2] laser. Fiz. Khim. Obrab. Mater. 1, 43 (2008) (in Russian).
G. Miyaji, K. Miyazaki. Origin of periodicity in nanostructuring on thin film surfaces ablated with femtosecond laser pulses. Opt. Express 16, 16265 (2008).
https://doi.org/10.1364/OE.16.016265
M. Shen, J.E. Carey, C.H. Crouch, M. Kandyla, H.A. Stone, E. Mazur. High-density regular arrays of nanometerscale rods formed on silicon surfaces via femtosecond laser irradiation in water. Nano Lett. 8, 2087 (2008).
https://doi.org/10.1021/nl080291q
C. Radu, S. Simion, M. Zamfirescu, M. Ulmeanu, M. Enculescu, M. Radoiu. Silicon structuring by etching with liquid chlorine and fluorine precursors using femtosecond laser pulses. J. Appl. Phys. 110, 1063 (2011).
https://doi.org/10.1063/1.3619856
N.D. Vorzobova, Yu.E. Burunkova, V.G. Bulgakova, I.Yu. Denisyuk, N.M. Kalinin. Preparation of periodic structures in polymeric UV-hardened composite materials by laser interference lithography. Izv. Vyssh. Ucheb. Zaved. Priborostr. 54, No. 12, 62 (2011) (in Russian).
J. Heitz, B. Reisinger, V. Fahrner. In Proceeding of the International Conference on Transparent Optical Networks (Coventry, 2012), p. 1.
E. Rebollar, J. V’azquez de Aldana, I. Mart’ın-Fabiani, M. Hernandez, D.R. Rueda, T.A. Ezquerra, C. Domingo, P. Moreno, M. Castillejo. Assessment of femtosecond laser induced periodic surface structures on polymer films. Phys. Chem. Chem. Phys. 15, 11287 (2013).
https://doi.org/10.1039/c3cp51523k
Yu.K. Veryovkin, N.G. Bronnikova, V.V. Korolikhin, Yu.Yu. Gushina, V.N. Petryakov, D.O. Filatov, N.M. Bityurin, A.V. Kruglov, V.V. Levichev. Formation of twodimensional periodic nanostructures on the surface of fused quartz, polyimide, and polycrystalline diamond using the method of pulsed four-beam laser interference modification. Zh. Tekhn. Fiz. 73, N 6, 99 (2003) (in Russian).
S.V. Makarov. Ph.D. thesis Nano- and microstructuring of metal and semiconductor surfaces in the air under the action of femtosecond laser pulses. (Lebedev Fiz. Inst. Ross. Akad. Nauk, 2014) (in Russian).
S.A. Akhmanov, V.I. Emel'yanov, N.I. Koroteev, V.N. Semynogov. Influence of high-power laser radiation on the surface of semiconductors and metals: nonlinear optical effects and nonlinear-optical diagnostics. Usp. Fiz. Nauk 147, 675 (1985) (in Russian).
https://doi.org/10.3367/UFNr.0147.198512b.0675
S.V. Zabotnov, I.A. Ostapenko, L.A. Golovan, V.Yu. Timoshenko, P.K. Kashkarov, G.D. Shandybina. Thirdharmonic generation from a silicon surface structured by femtosecond laser pulses. Quant. Electron. 35, 943 (2005).
https://doi.org/10.1070/QE2005v035n10ABEH013011
T. Scheidt, E.G. Rohwer, H.M. von Bergmann, H. Stafast. Charge-carrier dynamics and trap generation in native Si/SiO2 interfaces probed by optical second-harmonic generation. Phys. Rev. B 69, 165314 (2004).
https://doi.org/10.1103/PhysRevB.69.165314
P.H. Neethling, T. Scheidt, E.G. Rohwer. Second harmonic generation as a technique to probe buried interfaces: research letter. South African J. Sci. 105, 282 (2009), http://hdl.handle.net/10520/EJC96944.
V.P. Veiko, A.M. Skvortsov, V.I. Sokolov, Ph. Q. Tung, R.A. Khalecki, E.I. Efimov. Effect of laser irradiation on the structures properties such as SiO2/Si. Proc. SPIE 7996, 79960S (2010).
https://doi.org/10.1117/12.889523
Z.Yu. Gotra, S.A. Osered'ko. Control of the surface layer properties in microelectronic technology with the help of laser light. Zarubezh. Elektron. Tekhn. 12, 3 (1985) (in Russian).
J. Hl’avka, H. Jel’ınkov’a, K. Hamal, V. Prochock’y. Pulsed laser-induced recombination centers in silicon. J. Appl. Phys. 56, 1245 (1984).
https://doi.org/10.1063/1.334061
E.I. Gurevich, S.V. Gurevich. Laser induced periodic surface structures induced by surface plasmons coupled via roughness. Appl. Surf. Sci. 302, 118 (2014) .
https://doi.org/10.1016/j.apsusc.2013.10.141
S.I. Anisimov, B.S. Luk'yanchuk. Selected problems of laser ablation theory. Phys. Usp. 45, 293 (2002).
https://doi.org/10.1070/PU2002v045n03ABEH000966
Z. Wang, J. Li, X. Huang. Patterned structures of silicon nanocrystals prepared by laser annealing. Solid State Commun. 117, 383 (2001).
https://doi.org/10.1016/S0038-1098(00)00463-4
J. Richter, J. Meinertz, J. Ihlemann. Patterned laser annealing of silicon oxide films. Appl. Phys. A 104, 759 (2011).
https://doi.org/10.1007/s00339-011-6451-8
D. Wang, J. Ihlemann, P. Schaaf. Complex patterned gold structures fabricated via laser annealing and dealloying. Appl. Surf. Sci. 302, 74 (2014) .
https://doi.org/10.1016/j.apsusc.2013.12.066
J. Bonse, J. Kr¨uger, S. H¨ohm, A. Rosenfeld. Femtosecond laser-induced periodic surface structures. J. Laser Appl. 24, 042006 (2012).
https://doi.org/10.2351/1.4712658
S. Richter, M. Heinrich, S. D¨oring. Nanogratings in fused silica: Formation, control, and applications. J. Laser Appl. 24, 042008 (2012).
https://doi.org/10.2351/1.4718561
I. Mingareev, T. Bonhoff, A. El-Sherif. Femtosecond laser post-processing of metal parts produced by laser additive manufacturing. J. Laser Appl. 25, 052009 (2013).
https://doi.org/10.2351/1.4824146
B. Tan, K. Venkatakrishnan. A femtosecond laser-induced periodical surface structure on crystalline silicon. J. Micromech. Microeng. 16, 1080 (2006).
https://doi.org/10.1088/0960-1317/16/5/029
Y. Huang, S. Liu, W. Li, Y. Liu, W. Yang. Two-dimensional periodic structure induced by single-beam femtosecond laser pulses irradiating titanium. Opt. Express 17 (23), 20756 (2009).
https://doi.org/10.1364/OE.17.020756
T. Huynh, A. Petit, N. Semmar. Picosecond laser induced periodic surface structure on copper thin films. Appl. Surf. Sci. 302, 109 (2014).
https://doi.org/10.1016/j.apsusc.2013.10.172
J.Z.P. Skolski, G.R.B.E. Romer, J.V. Obona, V. Ocelik, A.J. Huis in't Veld, J.Th.M. De Hosson. Laser-induced periodic surface structures: Fingerprints of light localization. Phys. Rev. B 85, 075320 (2012).
https://doi.org/10.1103/PhysRevB.85.075320
T.J.-Y. Derrien, R. Torres, T. Sarnet, M. Sentis, T.E. Itina. Formation of femtosecond laser induced surface structures on silicon: Insights from numerical modeling and single pulse experiments. Appl. Surf. Sci. 258, 9487 (2012).
https://doi.org/10.1016/j.apsusc.2011.10.084
G. Obara, N. Maeda, T. Miyanishi, M. Terakawa, N.N. Nedyalkov, M. Obara. Plasmonic and Mie scattering control of far-field interference for regular ripple formation on various material substrates. Opt. Express 19, 19093 (2011).
https://doi.org/10.1364/OE.19.019093
M. Huang, F. Zhao, Y. Cheng, N. Xu, Z. Xu. Origin of laser-induced near-subwavelength ripples: Interference between surface plasmons and incident laser. ACS Nano 3, 4062 (2009).
https://doi.org/10.1021/nn900654v
J. Wang, C. Guo. Ultrafast dynamics of femtosecond laser-induced periodic surface pattern formation on metals. Appl. Phys. Lett. 87, 251914 (2005).
https://doi.org/10.1063/1.2146067
T. Apostolova, A.A. Ionin, S.I. Kudryashov, L.V. Seleznev, D.V. Sinitsyn. Self-limited ionization in bandgap renormalized GaAs at high femtosecond laser intensities. Opt. Eng. 51, 121808 (2012).
https://doi.org/10.1117/1.OE.51.12.121808
Z. Zhang, Z. Wang, D. Wang, Y. Ding. Periodic antireflection surface structure fabricated on silicon by four-beam laser interference lithography. J. Laser Appl. 26, 012010 (2014).
https://doi.org/10.2351/1.4849715
M. Ellman, A. Rodr’ıguez, N. P’erez, M. Echeverria, Y. Verevkin, C. Peng, T. Berthou, Z. Wang, S. Olaizola, I. Ayerdi. High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation. Appl. Surf. Sci. 255, 5537 (2009).
https://doi.org/10.1016/j.apsusc.2008.07.201
O.O. Havryliuk, O.Yu. Semchuk. Propagation of temperature profiles in non-stoichiometric SiO films at two-beam laser annealing. Fiz. Khim. Tverd. Tila 15, 862 (2014) (in Ukrainian).
O.O. Havryliuk. Theoretical study on laser annealing of non-stoichiometric SiO films. Khim. Fiz. Tekhnol. Poverkhni 5, 461 (2014).
Downloads
Published
Issue
Section
License
Copyright Agreement
License to Publish the Paper
Kyiv, Ukraine
The corresponding author and the co-authors (hereon referred to as the Author(s)) of the paper being submitted to the Ukrainian Journal of Physics (hereon referred to as the Paper) from one side and the Bogolyubov Institute for Theoretical Physics, National Academy of Sciences of Ukraine, represented by its Director (hereon referred to as the Publisher) from the other side have come to the following Agreement:
1. Subject of the Agreement.
The Author(s) grant(s) the Publisher the free non-exclusive right to use the Paper (of scientific, technical, or any other content) according to the terms and conditions defined by this Agreement.
2. The ways of using the Paper.
2.1. The Author(s) grant(s) the Publisher the right to use the Paper as follows.
2.1.1. To publish the Paper in the Ukrainian Journal of Physics (hereon referred to as the Journal) in original language and translated into English (the copy of the Paper approved by the Author(s) and the Publisher and accepted for publication is a constitutive part of this License Agreement).
2.1.2. To edit, adapt, and correct the Paper by approval of the Author(s).
2.1.3. To translate the Paper in the case when the Paper is written in a language different from that adopted in the Journal.
2.2. If the Author(s) has(ve) an intent to use the Paper in any other way, e.g., to publish the translated version of the Paper (except for the case defined by Section 2.1.3 of this Agreement), to post the full Paper or any its part on the web, to publish the Paper in any other editions, to include the Paper or any its part in other collections, anthologies, encyclopaedias, etc., the Author(s) should get a written permission from the Publisher.
3. License territory.
The Author(s) grant(s) the Publisher the right to use the Paper as regulated by sections 2.1.1–2.1.3 of this Agreement on the territory of Ukraine and to distribute the Paper as indispensable part of the Journal on the territory of Ukraine and other countries by means of subscription, sales, and free transfer to a third party.
4. Duration.
4.1. This Agreement is valid starting from the date of signature and acts for the entire period of the existence of the Journal.
5. Loyalty.
5.1. The Author(s) warrant(s) the Publisher that:
– he/she is the true author (co-author) of the Paper;
– copyright on the Paper was not transferred to any other party;
– the Paper has never been published before and will not be published in any other media before it is published by the Publisher (see also section 2.2);
– the Author(s) do(es) not violate any intellectual property right of other parties. If the Paper includes some materials of other parties, except for citations whose length is regulated by the scientific, informational, or critical character of the Paper, the use of such materials is in compliance with the regulations of the international law and the law of Ukraine.
6. Requisites and signatures of the Parties.
Publisher: Bogolyubov Institute for Theoretical Physics, National Academy of Sciences of Ukraine.
Address: Ukraine, Kyiv, Metrolohichna Str. 14-b.
Author: Electronic signature on behalf and with endorsement of all co-authors.










