Study of the Distribution Oftemperature Profiles in Nonstoichiometric SiOx Films at Laser Annealing

Authors

  • O. O. Gavrylyuk Chuiko Institute of Surface Chemistry, Nat. Acad. of Sci. of Ukraine
  • O. Yu. Semchuk Chuiko Institute of Surface Chemistry, Nat. Acad. of Sci. of Ukraine
  • O. V. Steblova V. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • A. A. Evtukh V. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • L. L. Fedorenko V. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine

DOI:

https://doi.org/10.15407/ujpe59.07.0712

Keywords:

SiOx films, thermal conductivity, nanocrystals

Abstract

The distribution of temperature profiles in nonstoichiometric SiOx films at the single pulse laser annealing has been studied theoretically. Temperature distributions on the surface of the SiOx films at irradiation by a laser beam with various intensities have been calculated. Temperature distributions on various depths of the SiOx films at irradiation by a laser beam with an intensity of 52 МW/cm2 have been found. During the laser pulse of 10 ns with an intensity of 52 MW/cm2, the temperature up to 1800 K can be reached on the specimen surface.

References

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Published

2018-10-24

How to Cite

Gavrylyuk, O. O., Semchuk, O. Y., Steblova, O. V., Evtukh, A. A., & Fedorenko, L. L. (2018). Study of the Distribution Oftemperature Profiles in Nonstoichiometric SiOx Films at Laser Annealing. Ukrainian Journal of Physics, 59(7), 712. https://doi.org/10.15407/ujpe59.07.0712

Issue

Section

Solid matter

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