Дослiдження мiкророзрядної системи з тангенцiальною подачею газу

Автор(и)

  • O. V. Solomenko Taras Shevchenko National University of Kyiv, Faculty of Radio Physics, Electronics, and Computer Systems
  • O. V. Prysiazhna Taras Shevchenko National University of Kyiv, Faculty of Radiophysics, Electronics, and Computer Systems
  • V. Ya. Chernyak Taras Shevchenko National University of Kyiv, Faculty of Radiophysics, Electronics, and Computer Systems
  • V. V. Lendiel Taras Shevchenko National University of Kyiv, Faculty of Radiophysics, Electronics, and Computer Systems
  • D. K. Hamazin Taras Shevchenko National University of Kyiv, Faculty of Radiophysics, Electronics, and Computer Systems
  • Eu. V. Martysh Taras Shevchenko National University of Kyiv, Faculty of Radio Physics, Electronics, and Computer Systems
  • D. O. Kalustova Taras Shevchenko National University of Kyiv, Faculty of Radio Physics, Electronics, and Computer Systems
  • I. V. Prysiazhnevych Taras Shevchenko National University of Kyiv, Faculty of Radio Physics, Electronics, and Computer Systems

DOI:

https://doi.org/10.15407/ujpe61.11.0960

Ключові слова:

мiкророзряд, вихровий потiк, оптична емiсiйна спектроскопiя

Анотація

Проведено дослiдження мiкророзрядної системи за використання рiзних плазмоутворюючих газiв. Представлено результати по вимiряних вольт-амперних характеристиках та емiсiйної спектроскопiї. Визначено параметри заселення збуджених коливальних та обертальних рiвнiв компонент плазми.

Посилання

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Завантаження

Опубліковано

2019-01-04

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Розділ

Плазма і гази

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