Destruction of Nano-Inhomogeneities of the Surface of Dielectrics Using the Optical Near-Field
DOI:
https://doi.org/10.15407/ujpe62.09.0763Keywords:
subnano-polishing, destruction, dipole-dipole interaction, photodissociation, optical near-field, evanescent waveAbstract
The destruction of surface nano-inhomogeneities of a quartz substrate using the optical near-field dipole-dipole interaction of atomic chlorine with SiO2 is studied. A method to obtain atomic chlorine by the local photodissociation of molecular chlorine by the optical near-field of the quartz substrate nano-inhomogeneities is proposed. The polarization of chlorine atoms and SiO2 by means of an evanescent wave, which is generated on the substrate surface, is investigated. A method is proposed to obtain the most optimal orientation of the dipoles of atomic chlorine and SiO2, using the features of the optical near-field, to maximally efficiently destroy the quartz substrate nano-inhomogeneities. The application of the composite quasiparticle model describing the optical near-field interaction of dipoles is considered.
References
L.M. Cook. Chemical processes in glass polishing. J. NonCryst. Solids 120, 152 (1990).
https://doi.org/10.1016/0022-3093(90)90200-6
M. Ohtsu. Progress in Nano–Electro–Optics VII (Springer, 2010) [ISBN: 978-3-642-03951-5].
https://doi.org/10.1007/978-3-642-03951-5
G. Otsu, T. Yatsui, T. Kawazoe, K. Nomura. Patent of Japan, No. JP2013143169A (2013).
G. Otsu, T. Kawazoe, K. Nomura, T. Yatsui. Patent of Japan, No. JP2014022411A (2014).
G. Otsu, T. Yatsui. Patent of Japan, No. JP2015162518A (2015).
G. Otsu, T. Yatsui, Patent of Japan, No. JP2016171189A (2016).
V.S. Sydorenko, Y.O. Gayday, S.V. Zhyla. Peculiarities of the near-field of a Hertz dipole. Visn. Kyiv. Nats. Univ. (Ser. Fiz. Mat.) 2, 365 (2005).
K. Kobayashi, T. Kawazoe, M. Ohtsu. Importance of multiple-phonon interactions in molecular dissociation and nanofabrication using optical near fields. IEEE Trans. Nanotechnol. 4, 517 (2005).
https://doi.org/10.1109/TNANO.2005.851406
A.L. Ivanov, H. Haug, L.V. Keldysh. Optics of excitonic molecules in semiconductors and semiconductor microstructures. Phys. Rep. 296, 237 (1998).
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