Nuclear Microanalysis Study of Surface Nanolayers in Gold–Silicon Structures
DOI:
https://doi.org/10.15407/ujpe58.04.0311Keywords:
nuclear microanalysis, Rutherford backscattering, particle induced X-ray emission, alpha particles, “Nuclear scanning probe”, surface layers, interface layerAbstract
The Rutherford backscattering and particle-induced X-ray emission methods are used to study the surface layers in gold–silicon structures, the parameters of which govern the operational characteristics of electron devices constructed on their basis. The measurements are performed on a high-precision microanalytical unit “Nuclear scanning probe” recently put into operation at the “Spectrum” laboratory. The thicknesses of a gold layer sputtered onto the specimen surface were about 17 and 20 nm for two different specimens. The layer non-uniformity was less than 1.6 nm and did not exceed the experimental error. A substantial amount of the fluorine impurity was revealed under the gold layer in the gold–silicon interface layer. Probably, it may be remnants of fluorine remaining after the etching of the silicon surface in a mixture of acids that included the hydrofluoric one (HF). The amount of fluorine detected in a series of measurements was found to strongly correlate with the current of alpha-particles at the target surface during the spectrum measurement. Since the local heating of the target depends on the current, it is evident that the local diffusion rate of fluorine atoms varied over the target surface.
References
<li> S. Lebed, M. Tolmachov, O. Kukharenko, and O. Veselov, Nucl. Instrum. Methods B 267, 2013 (2009). <a href="https://doi.org/10.1016/j.nimb.2009.03.007">https://doi.org/10.1016/j.nimb.2009.03.007</a></li>
<li> Scanning ionic probe from the "Spectrum" laboratory, http://www.prober.in.</li>
<li> W.K. Chu, J.W. Mayer, and M.A. Nicolet, Backscattering Spectrometry (Academic Press, New York, 1978).</li>
<li> S.A.E. Johanson and T.B. Johanson, Nucl. Instrum. Methods B 137, 473 (1976). <a href="https://doi.org/10.1016/0029-554X(76)90470-5">https://doi.org/10.1016/0029-554X(76)90470-5</a></li>
<li> N.L. Glinka, General Chemistry (Gordon and Breach, New York, 1965). </li>
<li> M.B.H. Breese, D.N. Jamieson, and P.J.C. King, Materials Analysis Using a Nuclear Microprobe (Wiley, New York, 1996).</li>
<li> J. Maxwell, J. Campbell, and W. Teesdale, Nucl. Instrum. Methods B 43, 218 (1989). <a href="https://doi.org/10.1016/0168-583X(89)90042-6">https://doi.org/10.1016/0168-583X(89)90042-6</a></li>
</ol>
Downloads
Published
How to Cite
Issue
Section
License
Copyright Agreement
License to Publish the Paper
Kyiv, Ukraine
The corresponding author and the co-authors (hereon referred to as the Author(s)) of the paper being submitted to the Ukrainian Journal of Physics (hereon referred to as the Paper) from one side and the Bogolyubov Institute for Theoretical Physics, National Academy of Sciences of Ukraine, represented by its Director (hereon referred to as the Publisher) from the other side have come to the following Agreement:
1. Subject of the Agreement.
The Author(s) grant(s) the Publisher the free non-exclusive right to use the Paper (of scientific, technical, or any other content) according to the terms and conditions defined by this Agreement.
2. The ways of using the Paper.
2.1. The Author(s) grant(s) the Publisher the right to use the Paper as follows.
2.1.1. To publish the Paper in the Ukrainian Journal of Physics (hereon referred to as the Journal) in original language and translated into English (the copy of the Paper approved by the Author(s) and the Publisher and accepted for publication is a constitutive part of this License Agreement).
2.1.2. To edit, adapt, and correct the Paper by approval of the Author(s).
2.1.3. To translate the Paper in the case when the Paper is written in a language different from that adopted in the Journal.
2.2. If the Author(s) has(ve) an intent to use the Paper in any other way, e.g., to publish the translated version of the Paper (except for the case defined by Section 2.1.3 of this Agreement), to post the full Paper or any its part on the web, to publish the Paper in any other editions, to include the Paper or any its part in other collections, anthologies, encyclopaedias, etc., the Author(s) should get a written permission from the Publisher.
3. License territory.
The Author(s) grant(s) the Publisher the right to use the Paper as regulated by sections 2.1.1–2.1.3 of this Agreement on the territory of Ukraine and to distribute the Paper as indispensable part of the Journal on the territory of Ukraine and other countries by means of subscription, sales, and free transfer to a third party.
4. Duration.
4.1. This Agreement is valid starting from the date of signature and acts for the entire period of the existence of the Journal.
5. Loyalty.
5.1. The Author(s) warrant(s) the Publisher that:
– he/she is the true author (co-author) of the Paper;
– copyright on the Paper was not transferred to any other party;
– the Paper has never been published before and will not be published in any other media before it is published by the Publisher (see also section 2.2);
– the Author(s) do(es) not violate any intellectual property right of other parties. If the Paper includes some materials of other parties, except for citations whose length is regulated by the scientific, informational, or critical character of the Paper, the use of such materials is in compliance with the regulations of the international law and the law of Ukraine.
6. Requisites and signatures of the Parties.
Publisher: Bogolyubov Institute for Theoretical Physics, National Academy of Sciences of Ukraine.
Address: Ukraine, Kyiv, Metrolohichna Str. 14-b.
Author: Electronic signature on behalf and with endorsement of all co-authors.
.png){kind=small}
