Thermochromic Properties of Vanadium Dioxide Films Obtained by Magnetron Sputtering
DOI:
https://doi.org/10.15407/ujpe56.6.534Keywords:
-Abstract
The structural, electrophysical, and optical properties of thermochromic VO2 films prepared by magnetron sputtering are investigated. It is shown that the thermochromic properties of VO2 films can be improved in the case of their two-stage formation: sputtering at a substrate temperature of 200 ºC followed by thermal annealing. The data of experimental studies confirm the formation of VO2 crystallites with a mean size of 26 nm and a monoclinic crystal lattice in the investigated films. At the phase transition, the change of the film conductivity reaches 3 orders of magnitude, while the optical transmission (at the probing light wavelength λ = 2 μm) changes by a factor of 16. It is shown that the variation of annealing parameters of the synthesized films allows one to change their thermochromic properties. The obtained results are explained in the framework of the model of formation of VO2 nanoinclusions.
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