Venger EF, Melnichuk LY, Melnichuk AV, Semikina TV. IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method. Ukr. J. Phys. [Internet]. 2019 Jan. 4 [cited 2024 Apr. 25];61(12):1053. Available from: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019006