Pavlyk BV, Kushlyk MO, Didyk RI, Shykorjak YA, Slobodzyan DP, Kulyk BY. Electrophysical Characteristics of Near-Surface Layers in p-Si Crystals with Sputtered Al Films and Subjected to Elastic Deformation. Ukr. J. Phys. [Internet]. 2018 Oct. 10 [cited 2024 Nov. 23];58(8):742. Available from: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2018346