Rahmati A, Khanzadeh M. Effect of Nitrogen Partial Pressure on Reactive Magnetron Sputtering From Ti13Cu87 Metalloid Target: Simulation of Chemical Composition. Ukr. J. Phys. [Internet]. 2012 Jun. 30 [cited 2024 Nov. 22];57(6):642. Available from: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2021247