Bilanych, B. V., O. Shylenko, V. M. Latyshev, A. Feher, V. S. Bilanych, V. M. Rizak, and V. Komanicky. “Interaction of Chalcogenide As4Se96 Films With Electron Beam When Used As Electronic Resists”. Ukrainian Journal of Physics 65, no. 3 (March 26, 2020): 247. Accessed June 15, 2024. https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019391.