RAHMATI, A.; KHANZADEH, M. Effect of Nitrogen Partial Pressure on Reactive Magnetron Sputtering From Ti13Cu87 Metalloid Target: Simulation of Chemical Composition. Ukrainian Journal of Physics, [S. l.], v. 57, n. 6, p. 642, 2012. DOI: 10.15407/ujpe57.6.642. Disponível em: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2021247. Acesso em: 22 nov. 2024.