Efremov, A. A.; Litovchenko, V. G.; Melnik, V. P.; Oberemok, O. S.; Popov, V. G.; Romanyuk, B. M. Mechanisms of Dopant Depth Profile Modification During Mass Spectrometric Analysis of Multilayer Nanostructures. Ukr. J. Phys. 2019, 60, 511.