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Venger, E., Melnichuk, L., Melnichuk, A. and Semikina, T. 2019. IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method. Ukrainian Journal of Physics. 61, 12 (Jan. 2019), 1053. DOI:https://doi.org/10.15407/ujpe61.12.1053.