Venger, E.F., Melnichuk, L.Y., Melnichuk, A.V. and Semikina, T.V. 2019. IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method. Ukrainian Journal of Physics. 61, 12 (Jan. 2019), 1053. DOI:https://doi.org/10.15407/ujpe61.12.1053.