Study of the Neon Dielectric Barrier Discharge on a Capacitively Coupled Radio Frequency at a Low Pressure with Metastable Atom Density: Effect of the Pressure
DOI:
https://doi.org/10.15407/ujpe67.7.504Keywords:
capacitively coupled, RF glow discharge, Gauss law, dielectric barrier dischargesAbstract
We study the neon dielectric barrier discharge with metastable atom density on a capacitively coupled radio frequency at a pressure of about 4–12 Torr. The transport parameters of neon are dependent on the electron energy, and their range is about 0.04–50 eV. A one-dimensional fluid model and the drift-diffusion theory are used to describe the neon dielectric barrier discharge. The effect of the gas pressure on the properties of neon dielectric barrier discharge is presented for the cycle-averaged regime. It is shown that the particle densities, electric potential, and metastable atom density increase with the pressure. In addition, the surface charge concentration and the gap voltage increase as well.
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