Nano-Size Phase Formation at Acoustically Stimulated Ion Beam Synthesis

  • V. G. Litovchenko V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • V. P. Melnik V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • B. M. Romanjuk V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
Keywords: ion implantation, ultrasound excitation, defects, diffusion, nanoclusters, buried layers

Abstract

The results of researches on the interaction of accelerated ions with a solid at the in situ ultra-sonic treatment are reported. A proposed combined method of acoustically stimulated ion beam doping of solid-state targets allows one to efficiently control the redistribution of radiation-induced defects that emerge during the interaction of accelerated particles with the solid. This method makes it possible to affect the rate of quasichemical reactions in nano-sized structures, stimulate the acceleration or deceleration of mass transfer processes, and change conditions of formation, growth, and decay of phases in solid-state matrices.

References

J.F. Ziegler, Ion Implantation: Science and Technology (Academic Press, San Diego, 1988).

M. Nastasi and J.W. Mayer, Ion Implantation and Synthesis of Materials (Springer, Berlin, 2006). https://doi.org/10.1007/978-3-540-45298-0

O. Bondarchuk, S. Goysa, I. Koval, P. Melnik, and M. Nakhodkin, Appl. Surf. Sci. 255, 6421, (2009). https://doi.org/10.1016/j.apsusc.2009.02.031

D. Krueger, R. Kurps, B. Romanjuk, V. Melnik, and Ja. Olich, Patent US 6358823 B1 (2002).

B. L¨uthi, Physical Acoustics in the Solid State (Springer, New York, 2007).

A.G. Chelyadinsky and F.F. Komarov, Usp. Fiz. Nauk 173, 813 (2003). https://doi.org/10.3367/UFNr.0173.200308b.0813

A. Romanyuk, V. Spassov, and V. Melnik, J. Appl. Phys. 99, 034314 (2006). https://doi.org/10.1063/1.2171773

A. Romanyuk, P. Oelhafen, R. Kurps, and V. Melnik, Appl. Phys. Lett. 90, 013118 (2007). https://doi.org/10.1063/1.2430055

A. Romanyuk, V. Melnik, Ya. Olikh, J. Biskupek, U. Kaiser, M. Feneberg, K. Thonke, and P. Oelhafen, J. Luminesc. 130, 87 (2010).

V.G. Litovchenko, A.A. Efremov, B.N. Romanyuk, V.P. Mel'nik, and C. Claeys, J. Electrochem. Soc. 145, 8 (1998). https://doi.org/10.1149/1.1838746

V. Litovchenko, B. Romanyuk, V. Melnik, V. Klad'ko, V. Popov, O. Oberemok, and I. Khatsevich, Solid State Phenom. 178–179, 17 (2011). https://doi.org/10.4028/www.scientific.net/SSP.178-179.17

A. Romanyuk, P. Oelhafen, R. Steiner, P.M. Nellen, J.C. Reiner, and V. Melnik, Surf. Sci. 595, 35 (2005). https://doi.org/10.1016/j.susc.2005.07.035

A. Romanyuk, R. Steiner, V. Melnik, and V. Thommen, Surf. Interf. Anal. 38, 1242 (2006). https://doi.org/10.1002/sia.2386

A. Romanjuk, V. Melnik, and P. Oelhafen, Nucl. Instrum. Methods Phys. Res. B 232, 358 (2005). https://doi.org/10.1016/j.nimb.2005.03.073

B. Romanyuk, D. Kr¨uger, V. Melnik, V. Popov, E. Borshchagovskyi, Ya. Olikh, and V. Soroka, Ukr. J. Phys. 46, 191 (2001).

B. Romanyuk, V. Melnik, Ya. Olikh, V. Popov, and D. Kr¨uger, Semicond. Sci. Technol. 16, 397 (2001). https://doi.org/10.1088/0268-1242/16/5/320

M.G. Nakhodkin and M.I. Fedorchenko, Metallofiz. Noveish. Tekhnol. 26, 1639 (2004).

N. Nakhodkin, N. Kulish, and T. Rodionova, Phys. Status Solidi A 207, 316, (2010). https://doi.org/10.1002/pssa.200824482

D. Kr¨uger, R. Kurps, B. Romanyuk, V. Melnik, and Ya. Olikh, J. Vac. Sci. Technol. B 20, 1448 (2002). https://doi.org/10.1116/1.1493784

V.P. Melnik, Y.M. Olikh, V.G. Popov, B.M. Romanyuk, Y.V. Goltvyanskii, and A.A. Evtukh, Mater. Sci. Eng. B 124–125, 327 (2005). https://doi.org/10.1016/j.mseb.2005.08.039

O.I. Gudimenko, V.P. Kladko, V.P. Melnik, Ya.M. Olikh, V.G. Popov, B.M. Romanyuk, M.V. Slobodian, and P.P. Kogutyk, Ukr. J. Phys. 53, 140 (2008).

B.M. Romanjuk, V.P. Kladko, V.P. Melnik, V.G. Popov, V.M. Yuchimchuk, A.I. Gudymenko, Ya.M. Olikh, G. Weidner, and D. Kruger, Mater. Sci. Semicond. Process. 8, 171 (2005). https://doi.org/10.1016/j.mssp.2004.09.030

C. Ternon, F. Gourbilleau, C. Dufour, J.L. Doualan, and B. Garrido, J. Luminesc. 99, 361 (2002).

V.A. Krasilnikov and V.V. Krylov, Introduction to Physical Acoustics (Nauka, Moscow, 1984) (in Russian).

Published
2019-01-22
How to Cite
Litovchenko, V., Melnik, V., & Romanjuk, B. (2019). Nano-Size Phase Formation at Acoustically Stimulated Ion Beam Synthesis. Ukrainian Journal of Physics, 60(1), 64. https://doi.org/10.15407/ujpe60.01.0064
Section
Solid matter

Most read articles by the same author(s)

1 2 > >>