Nano-Size Phase Formation at Acoustically Stimulated Ion Beam Synthesis
Keywords:ion implantation, ultrasound excitation, defects, diffusion, nanoclusters, buried layers
The results of researches on the interaction of accelerated ions with a solid at the in situ ultra-sonic treatment are reported. A proposed combined method of acoustically stimulated ion beam doping of solid-state targets allows one to efficiently control the redistribution of radiation-induced defects that emerge during the interaction of accelerated particles with the solid. This method makes it possible to affect the rate of quasichemical reactions in nano-sized structures, stimulate the acceleration or deceleration of mass transfer processes, and change conditions of formation, growth, and decay of phases in solid-state matrices.
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