Interaction of Molecular Oxygen with Si(001) Surface Covered with a Chromium or Titanium Monolayer
DOI:
https://doi.org/10.15407/ujpe60.01.0046Keywords:
oxidation, chromium, titanium, siliconAbstract
The results of experimental researches concerning the initial stages of the interaction between the Si(001) surface covered with a chromium or titanium monolayer and molecular oxygen at exposures to 107L (Langmuir) are reported. On the basis of experimental data, the coefficient of molecular oxygen sticking is calculated. It is shown that not only silicon but also titanium oxides are formed on the Si(001) surface covered with a titanium monolayer. The researches are carried out, by using the Auger electron spectroscopy method.
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Kyiv, Ukraine
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