Interaction of Molecular Oxygen with Si(001) Surface Covered with a Chromium or Titanium Monolayer

  • I. P. Koval Taras Shevchenko National University of Kyiv, Faculty of Radiophysics, Electronics, and Computer Systems
  • Yu. A. Len Taras Shevchenko National University of Kyiv, Faculty of Radiophysics, Electronics, and Computer Systems
  • M. G. Nakhodkin Taras Shevchenko National University of Kyiv, Faculty of Radiophysics, Electronics, and Computer Systems
  • M. O. Svishevs’kyi Taras Shevchenko National University of Kyiv, Faculty of Radiophysics, Electronics, and Computer Systems
  • M. Yu. Yakovenko Taras Shevchenko National University of Kyiv, Faculty of Radiophysics, Electronics, and Computer Systems
Keywords: oxidation, chromium, titanium, silicon

Abstract

The results of experimental researches concerning the initial stages of the interaction between the Si(001) surface covered with a chromium or titanium monolayer and molecular oxygen at exposures to 107L (Langmuir) are reported. On the basis of experimental data, the coefficient of molecular oxygen sticking is calculated. It is shown that not only silicon but also titanium oxides are formed on the Si(001) surface covered with a titanium monolayer. The researches are carried out, by using the Auger electron spectroscopy method.

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Published
2019-01-22
How to Cite
Koval, I., Len, Y., Nakhodkin, M., Svishevs’kyi, M., & Yakovenko, M. (2019). Interaction of Molecular Oxygen with Si(001) Surface Covered with a Chromium or Titanium Monolayer. Ukrainian Journal of Physics, 60(1), 46. https://doi.org/10.15407/ujpe60.01.0046
Section
Solid matter