Effect of Tin on Structural Transformations in the Thin-Film Silicon Suboxide Matrix
DOI:
https://doi.org/10.15407/ujpe61.11.0980Keywords:
crystallization, amorphous silicon, tin, nano-sized silicon crystallitesAbstract
The processes of crystallization of amorphous silicon (a-Si) in the a-SiOxSn (1 ≤ x ≤ 2) sub-oxide matrix have been studied. The temperature, at which the crystallization begins, is shown to be lower for a-SiOxSn films with higher tin contents. For specimens with the maximum tin content (about 2 vol.%), the crystallization begins at a temperature of 500 ∘C; for specimens with the average tin content (about 1 vol.%), the crystallization temperature equals 800 ∘C; and for specimens with the minimum tin content (about 0.5 vol.%), the crystallization of a-Si starts at 1000 ∘C. On the other hand, it is shown that tin does not influence the separation of a-Si and the SiO2 phase in the examined specimens. It is found theoretically that silicon crystallites that are formed during the crystallization of a-Si are much smaller (d ≈ 5÷7 nm) in a-SiOxSn films with a high tin content (1 and 2 vol.%) in comparison with the tin-free specimens (d ≥ 10 nm). A metal-induced mechanism of crystallization of a-Si has been proposed, which predicts the existence of tin metal clusters in SiOx that create conditions for the easier transition of the amorphous silicon phase into the crystalline one. On the basis of experimental data, it is supposed that, in our case, a necessary condition for the crystallization of a-Si by the proposed metal-induced mechanism to start is the presence of metal (tin) aggregates in SiOx.
Downloads
Published
How to Cite
Issue
Section
License
Copyright Agreement
License to Publish the Paper
Kyiv, Ukraine
The corresponding author and the co-authors (hereon referred to as the Author(s)) of the paper being submitted to the Ukrainian Journal of Physics (hereon referred to as the Paper) from one side and the Bogolyubov Institute for Theoretical Physics, National Academy of Sciences of Ukraine, represented by its Director (hereon referred to as the Publisher) from the other side have come to the following Agreement:
1. Subject of the Agreement.
The Author(s) grant(s) the Publisher the free non-exclusive right to use the Paper (of scientific, technical, or any other content) according to the terms and conditions defined by this Agreement.
2. The ways of using the Paper.
2.1. The Author(s) grant(s) the Publisher the right to use the Paper as follows.
2.1.1. To publish the Paper in the Ukrainian Journal of Physics (hereon referred to as the Journal) in original language and translated into English (the copy of the Paper approved by the Author(s) and the Publisher and accepted for publication is a constitutive part of this License Agreement).
2.1.2. To edit, adapt, and correct the Paper by approval of the Author(s).
2.1.3. To translate the Paper in the case when the Paper is written in a language different from that adopted in the Journal.
2.2. If the Author(s) has(ve) an intent to use the Paper in any other way, e.g., to publish the translated version of the Paper (except for the case defined by Section 2.1.3 of this Agreement), to post the full Paper or any its part on the web, to publish the Paper in any other editions, to include the Paper or any its part in other collections, anthologies, encyclopaedias, etc., the Author(s) should get a written permission from the Publisher.
3. License territory.
The Author(s) grant(s) the Publisher the right to use the Paper as regulated by sections 2.1.1–2.1.3 of this Agreement on the territory of Ukraine and to distribute the Paper as indispensable part of the Journal on the territory of Ukraine and other countries by means of subscription, sales, and free transfer to a third party.
4. Duration.
4.1. This Agreement is valid starting from the date of signature and acts for the entire period of the existence of the Journal.
5. Loyalty.
5.1. The Author(s) warrant(s) the Publisher that:
– he/she is the true author (co-author) of the Paper;
– copyright on the Paper was not transferred to any other party;
– the Paper has never been published before and will not be published in any other media before it is published by the Publisher (see also section 2.2);
– the Author(s) do(es) not violate any intellectual property right of other parties. If the Paper includes some materials of other parties, except for citations whose length is regulated by the scientific, informational, or critical character of the Paper, the use of such materials is in compliance with the regulations of the international law and the law of Ukraine.
6. Requisites and signatures of the Parties.
Publisher: Bogolyubov Institute for Theoretical Physics, National Academy of Sciences of Ukraine.
Address: Ukraine, Kyiv, Metrolohichna Str. 14-b.
Author: Electronic signature on behalf and with endorsement of all co-authors.
.png){kind=small}
