Research of Conductivity in Polycrystalline Films with a Thin Coating Using the Modified Mayadas–Shatzkes Model
The experimental testing of the theoretical concepts of a modified Mayadas–Shatzkes model for the conductivity in thin polycrystalline films with a thin coating has been carried out. It is shown that the deposition of Ni coatings onto Co films increases the specific conductance in bilayer samples with respect to the conductivity in the basic (uncovered) specimen. At the same time, the coating of the Ni films with Cu and of the Cu films with Ni leads to a decrease of the film conductivity. This phenomenon takes place due to the enhancement or worsening of the grain boundary transparency when the coating is deposited.
M.E. Robles, C.A. Gonzalez-Fuentes, R. Henriquez, G. Kremer, L. Moraga, S. Oyarzun, M. Suarez, M. Flores, R. Munoz. Resistivity of thin gold flms on mica induced by electron–surface scattering: Application of quantitative scanning tunneling microscopy. Appl. Surf. Sci. 258, 3393 (2012).
K.R. Cofey, K. Barmak, T. Sun, A.P. Warren, B. Yao. Grain boundary and surface scattering in interconnect metals. In Proceedings of 2013 IEEE Interconnect Technology Conference (IEEE International, Kyoto, 2013), p. 1.
D.M. Freik, L.T. Harun, O.L. Sokolov, I.K. Yurchyshyn, V.Yu. Potyak. Quantum-size efects in thin flms and nanostructures (review). Prykarpat. Visn. Nauk. Tovar. Shevchenka Ser. Chyslo No. 1, 81 (2010) (in Ukrainian).
S.I. Petrushenko, S.V. Dukarov, V.N. Sukhov, I.G. Churilov. Inner size efect in the polycrystalline metal flms of fusible metals. Zh. Nano Elektron. Fiz. 7, 02033 (2015) (in Russian).
M. Hafner, W. Burgstaller, A.I. Mardare, A.W. Hassel. Aluminum–copper–nickel thin flm compositional spread: Nickel infuence on fundamental alloy properties and chemical stability of copper. Thin Solid Films 580, 36 (2015).
K.R. Henriquez, L.Moraga, G. Kremer, M. Flores, A. Espinosa, R.C. Munoz. Size efects in thin gold flms: Discrimination between electron-surface and electron-grain boundary scattering by measuring the Hall efect at 4 K. Appl. Phys. Lett. 102, 051608 (2013).
K. Barmak, A. Darbal, K.J. Ganesh, P.J. Ferreira, J.M. Rickman, T. Sun, B. Yao, A.P. Warren, K.R. Cofey. Surface and grain boundary scattering in nanometric Cu thin flms: A quantitative analysis including twin boundaries. J. Vac. Sci. Technol. A 32, 061503 (2014).
D.J. Keavney, K.S. Pur, F. Sharles. Difuse interface electron scattering in epitaxial Co/Cu bilayers. J. Appl. Phys. 91, 8108 (2002).
M.Wang, B. Zhang, G.P. Zhang, Q.Y. Yu, C.S. Liu. Efects of interface and grain boundary on the electrical resistivity of Cu/Ta multilayers. J. Mater. Sci. Technol. 25, 699 (2009).
R.I. Bigun, M.D. Buchkovs'ka, B.R. Penyukh, Z.V. Stasyuk, D.S. Leonov. Infuence of germanium sublayer on the percolation process in thin palladium flms. Nanosyst. Nanomater. Nanotekhnol. 10, 503 (2012) (in Ukrainian).
R.I. Bigun, M.D. Buchkovs'ka, V.M. Gavrylyukh, Ya.A. Pastyrs'kyi, Z.V. Stasyuk. Quantum-size efect in the electric conductivity of copper flms deposited on the surface of silicon and antimony sublayers. Nanosyst. Nanomater. Nanotekhnol. 13, 75 (2015) (in Ukrainian).
R.I. Bigun, Z.V. Stasyuk. Infuence of surface inhomogeneities on the charge transfer conditions in ultrathin metal flms. Metallofz. Noveish. Tekhnol. 36, 723 (2014) (in Ukrainian).
R.I. Bigun, V.M. Gavrylyuh, Z.V. Stasyuk, D.S. Leonov. Simulation of the size dependences of electric conductance in ultra-thin gold flms on the basis of quantum-size efect theories. Metallofz. Noveish. Tekhnol. 37, 317 (2015) (in Ukrainian).
A.M. Chornous, L.V. Dekhtyaruk, T.P. Govorun, A.O. Stepanenko. Infuence of difusing impurities on the electrical conductivity of single-crystal and polycrystalline metal flms. Metallofz. Noveish. Tekhnol. 29, 249 (2007).
A.F. Mayadas, M. Shatzkes. Electrical-resistivity model for polycrystalline flms: The case of arbitrary refection at external surfaces. Phys. Rev. B 1, 1382 (1970).
R.P. Volkova, L.S. Palatnik, A.T. Pugachev. Resistive method for studying low-temperature grain-boundary diffusion in two-layer polycrystalline flms. Fiz. Tverd. Tela 24, 1161 (1982) (in Russian).
T. Hovorun, A. Chornous. Thin overlayer infuence on electrophysical properties of nickel flms. Cryst. Res. Technol. 41, 458 (2006).
T.P. Hovorun, L.V. Dekhtyaruk, A.M. Chornous. Physical properties of nanocrystalline cobalt flms coated with Ni or SiO2. Metallofz. Noveish. Tekhnol. 29, 1479 (2007) (in Ukrainian).
T.P. Hovorun, A.O. Stepanenko, A.M. Chornous. Electro-physical properties of coppers flms with a thin nickel coating. Fiz. Khim. Tverd. Tila 5, 280 (2004) (in Ukrainian).
C.R. Pichard, C.R. Tellier, A.J. Tosser. Simple analytical expression for the Hall coefcient of polycrystalline metal flms at low magnetic feld. Phys. Status Solidi A 65, 327 (1981).
Yu.M. Ovcharenko, N.M. Opanasyuk, I.Yu. Protsenko, O.V. Shovkoplyas. Calculation of charge transfer parameters in thin metal flms under conditions of internal and external size efects. Ukr. Fiz. Zh. 14, 826 (1997) (in Ukrainian).
S.I. Vorob'yov, L.V. Odnodvorets', O.V. Pylypenko. A.M. Chornous. Phase composition and electric properties of iron flms. Nanosyst. Nanomater. Nanotekhnol. 10, 829 (2012) (in Ukrainian).
I.Yu. Protsenko, Yu.M. Ovcharenko, A.M. Chornous, T.P. Hovorun. Infuence of difusion processes on the electric properties of coated metal flms. Visn. Sumskogo Derzh. Univ. Ser. Fiz. Mat. Mekh. Nos. 5–6, 50 (2002) (in Ukrainian).
O.A. Bilous, L.V. Dekhtyaruk, A.M. Chornous. Size kinetic efects in polycrystalline Cu and Ni metal flms. Metallofz. Noveish. Tekhnol. 23, 43 (2001) (in Ukrainian).
W. Zhang, S.H. Brongersma, O. Richard, B. Brijs, R. Palmans, L. Froyen, K. Maex. Infuence of the electron mean free path on the resistivity of thin metal flms. Microelect. Eng. 76, 146 (2004).