Nanostructured Au Chips with Enhanced Sensitivity for Sensors Based on Surface Plasmon Resonance

I. Z. Indutnyi; Yu. V. Ushenin; V. I. Myn’ko; P. E. Shepeliavyi; M. V. Lukaniuk; A. A. Korchovyi; R. V. Khrystosenko

doi:10.15407/ujpe62.05.0365

Nanostructured Au Chips with Enhanced Sensitivity for Sensors Based on Surface Plasmon Resonance

Authors

I. Z. Indutnyi V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
Yu. V. Ushenin V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
V. I. Myn’ko V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
P. E. Shepeliavyi V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
M. V. Lukaniuk V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
A. A. Korchovyi V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
R. V. Khrystosenko V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine

DOI:

https://doi.org/10.15407/ujpe62.05.0365

Keywords:

surface plasmon resonance, biosensors, interference lithography, vacuum chalcogenide photoresists

Abstract

The enhancement of the sensitivity of a surface-plasmon-resonance refractometer by forming a periodic relief in the form of a grating with a submicron period on the surface of an Au chip has been studied. Periodic reliefs with the spatial frequency v = (3370 ± 5) line/mm and various depths were formed on the Au film surface using interference lithography and vacuum chalcogenide photoresists. The degree of refractometer sensitivity enhancement and the variation interval of the environment refractive index, Δn, in which this enhancement is observed, are found to depend on the grating relief depth. The interval Δn decreases with the growth of the relief depth, whereas the sensitivity increases from 110 deg/RIU for a standard chip to 154 and 363 deg/RIU for structured chips with relief depths of 11.7 ± 2 and 18.5 ± 2 nm, respectively.

References

C. Nylander, B. Liedberg, T. Lind. Gas detection by meansof surface plasmon resonance. Sens. Actuat. 3, 79 (1982).

https://doi.org/10.1016/0250-6874(82)80008-5

B. Moslehi, M.W. Foster, P. Harvey. Optical magnetic and electric field sensors based on surface plasmon polariton resonant coupling. Electron. Lett. 27, 951 (1991).

https://doi.org/10.1049/el:19910594

A. Schilling, O. Yava¸s, J. Bischof, J. Boneberg, P. Leiderer. Absolute pressure measurements on a nanosecond time scale using surface plasmons. Appl. Phys. Lett. 69, 4159 (1996).

https://doi.org/10.1063/1.116971

H.-M. Schmitt, A. Brecht, J. Piehler, G. Gauglitz. An integrated system for optical biomolecular interaction analysis. Biosens. Bioelectron. 12, 809 (1997).

https://doi.org/10.1016/S0956-5663(97)00046-8

L. Huang, G. Reekmans, D. Saerens, J.-M. Friedt, F. Frederix, L. Francis, S. Muyldermans, A. Campitelli, C. Van Hoof. Prostate-specific antigen immunosensing based on mixed self-assembled monolayers, camel antibodies and colloidal gold enhanced sandwich assays. Biosens. Bioelectron. 21, 483 (2005).

https://doi.org/10.1016/j.bios.2004.11.016

E. Mauriz, A. Calle, J.J. Mancl’us, A. Montoya, L.M. Lechuga. Multi-analyte SPR immunoassay for enviromental biosensing of pesticides. Analyt. Bioanalyt. Chem. 387, 1449 (2007).

https://doi.org/10.1007/s00216-006-0800-z

P.D. Patel. Overview of affinity biosensors in food analysis. J. AOAC Int. 89, 805 (2006).

E. Kretschmann, H. Raether. Radiative decay of nonradiative surface plasmons excited by light. Z. Naturforsch. 23A, 2135 (1968).

P. Englebienne, A. Van Hoonacker, M. Verhas. Surface plasmon resonance: principles, methods and applications in biomedical sciences. Spectroscopy 17, 255 (2003).

https://doi.org/10.1155/2003/372913

R.S. Moirangthem, Y.-C. Chang, P.-K. Wei. Ellipsometry study on gold-nanoparticle-coated gold thin film for biosensing application. Biomed. Opt. Express 2, 2569 (2011).

https://doi.org/10.1364/BOE.2.002569

K.M. Byun, S.J. Yoon, D. Kim, S.J. Kim. Experimental study of sensitivity enhancement in surface plasmon resonance biosensors by use of periodic metallic nanowires. Opt. Lett. 32, 1902 (2007).

https://doi.org/10.1364/OL.32.001902

W.P. Hu, S.-J. Chen, K.-T. Huang, J.H. Hsu, W.Y. Chen, G.L. Chang, K.-A. Lai. A novel ultrahigh-resolution surface plasmon resonance biosensor with an Au nanoclusterembedded dielectric film. Biosens. Bioelectron. 19, 1465 (2004).

https://doi.org/10.1016/j.bios.2003.12.001

C.J. Alleyne, A.G. Kirk, R.C. McPhedran, N-A.P. Nicorovici, D. Maystre. Enhanced SPR sensitivity using periodic metallic structures. Opt. Express 15, 8163 (2007).

https://doi.org/10.1364/OE.15.008163

A. Cattoni, E. Cambril, D. Decanini, G. Faini, A.M. Haghiri-Gosnet. Soft UV-NIL at 20 nm scale using flexible bi-layers tamp casted on HSQ master mold. Microelectr. Eng. 87, 1015 (2010).

https://doi.org/10.1016/j.mee.2009.11.106

Y. Fu, N. Kok, A. Bryan, W. Zhou. Self-organized formation of a Blazed-grating-like structure on Si(100) induced by focused ion-beam scanning. Opt. Express 12, 1803 (2004).

https://doi.org/10.1364/OPEX.12.001803

X.Y. Zhang, A.V. Whitney, J. Zhao, E.M. Hicks, R.P. Van Duyne. Advances in contemporary nanosphere lithographic techniques. J. Nanosci. Nanotechnol. 6, 1920 (2006).

https://doi.org/10.1166/jnn.2006.322

S.Y. Chuang, H.L. Chen, S.S. Kuo, Y.H. Lai, C.C. Lee. Using direct nanoimprinting to study extraordinary transmission in textured metal films. Opt. Express 16, 2415 (2008).

https://doi.org/10.1364/OE.16.002415

F. Brizuela, Y. Wang, C.A. Brewer, F. Pedaci, W. Chao, E.H. Anderson, Y. Liu, K.A. Goldberg, P. Naulleau, P. Wachulak, M.C. Marconi, D.T. Attwood, J.J. Rocca, C.S. Menoni. Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination. Opt. Lett. 34, 271 (2009).

https://doi.org/10.1364/OL.34.000271

A. Arriola, A. Rodriguez, N. Perez, T. Tavera, M.J. Withford, A. Fuerbach, S.M. Olaizola. Fabrication of high quality sub-micron Au gratings over large areas with pulsed laser interference lithography for SPR sensors. Opt. Mater. Express 2, 1571 (2012).

https://doi.org/10.1364/OME.2.001571

M. Vala, J. Homola. Flexible method based on fourbeam interference lithography for fabrication of large areas of perfectly periodic plasmonic arrays. Opt. Express 22, 18778 (2014).

https://doi.org/10.1364/OE.22.018778

I.Z. Indutnyi, V.I. Myn'ko, P.E. Shepeliavyi, M.V. Sopins'kyi, V.M. Tkach, V.A. Dan'ko. Photonic nanostructure formation using interference lithography and deposition at a gtrazingn incidence angle in vacuum. Optoelektr. Poluprovodn. Tekhn. 46,4 9 (2011) (in Russian).

V. Dan'ko, I. Indutnyi, M. Min'ko, P. Shepelyavyi. Instrumentation and Data Processing. Interference photolithography with the use of resists on the basis of chalcogenide glassy semiconductors. Optoelectron. Instrument. Proc. 46, 483 (2010).

V.A. Dan'ko, G.V. Dorozinsky, I.Z. Indutnyi, V.I. Myn'ko, Yu.V. Ushenin, P.E. Shepeliavyi, M.V. Lukaniuk, A.A. Korchovyi, R.V. Khrystosenko. Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist. Semiconductor Physics, Quantum Electronics & Optoelectronics 18, 438 (2015).

https://doi.org/10.15407/spqeo18.04.438

Downloads

Published

2018-12-15

How to Cite

Indutnyi, I. Z., Ushenin, Y. V., Myn’ko, V. I., Shepeliavyi, P. E., Lukaniuk, M. V., Korchovyi, A. A., & Khrystosenko, R. V. (2018). Nanostructured Au Chips with Enhanced Sensitivity for Sensors Based on Surface Plasmon Resonance. Ukrainian Journal of Physics, 62(5), 365. https://doi.org/10.15407/ujpe62.05.0365

Download Citation

Issue

Vol. 62 No. 5 (2017)

Section

Optics, lasers, and quantum electronics

License

Copyright Agreement
License to Publish the Paper
Kyiv, Ukraine

The corresponding author and the co-authors (hereon referred to as the Author(s)) of the paper being submitted to the Ukrainian Journal of Physics (hereon referred to as the Paper) from one side and the Bogolyubov Institute for Theoretical Physics, National Academy of Sciences of Ukraine, represented by its Director (hereon referred to as the Publisher) from the other side have come to the following Agreement:

1. Subject of the Agreement.
The Author(s) grant(s) the Publisher the free non-exclusive right to use the Paper (of scientific, technical, or any other content) according to the terms and conditions defined by this Agreement.

2. The ways of using the Paper.
2.1. The Author(s) grant(s) the Publisher the right to use the Paper as follows.
2.1.1. To publish the Paper in the Ukrainian Journal of Physics (hereon referred to as the Journal) in original language and translated into English (the copy of the Paper approved by the Author(s) and the Publisher and accepted for publication is a constitutive part of this License Agreement).
2.1.2. To edit, adapt, and correct the Paper by approval of the Author(s).
2.1.3. To translate the Paper in the case when the Paper is written in a language different from that adopted in the Journal.
2.2. If the Author(s) has(ve) an intent to use the Paper in any other way, e.g., to publish the translated version of the Paper (except for the case defined by Section 2.1.3 of this Agreement), to post the full Paper or any its part on the web, to publish the Paper in any other editions, to include the Paper or any its part in other collections, anthologies, encyclopaedias, etc., the Author(s) should get a written permission from the Publisher.

3. License territory.
The Author(s) grant(s) the Publisher the right to use the Paper as regulated by sections 2.1.1–2.1.3 of this Agreement on the territory of Ukraine and to distribute the Paper as indispensable part of the Journal on the territory of Ukraine and other countries by means of subscription, sales, and free transfer to a third party.

4. Duration.
4.1. This Agreement is valid starting from the date of signature and acts for the entire period of the existence of the Journal.

5. Loyalty.
5.1. The Author(s) warrant(s) the Publisher that:
– he/she is the true author (co-author) of the Paper;
– copyright on the Paper was not transferred to any other party;
– the Paper has never been published before and will not be published in any other media before it is published by the Publisher (see also section 2.2);
– the Author(s) do(es) not violate any intellectual property right of other parties. If the Paper includes some materials of other parties, except for citations whose length is regulated by the scientific, informational, or critical character of the Paper, the use of such materials is in compliance with the regulations of the international law and the law of Ukraine.

6. Requisites and signatures of the Parties.
Publisher: Bogolyubov Institute for Theoretical Physics, National Academy of Sciences of Ukraine.
Address: Ukraine, Kyiv, Metrolohichna Str. 14-b.
Author: Electronic signature on behalf and with endorsement of all co-authors.