Nanostructured Au Chips with Enhanced Sensitivity for Sensors Based on Surface Plasmon Resonance

  • I. Z. Indutnyi V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • Yu. V. Ushenin V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • V. I. Myn’ko V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • P. E. Shepeliavyi V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • M. V. Lukaniuk V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • A. A. Korchovyi V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
  • R. V. Khrystosenko V.E. Lashkaryov Institute of Semiconductor Physics, Nat. Acad. of Sci. of Ukraine
Keywords: surface plasmon resonance, biosensors, interference lithography, vacuum chalcogenide photoresists

Abstract

The enhancement of the sensitivity of a surface-plasmon-resonance refractometer by forming a periodic relief in the form of a grating with a submicron period on the surface of an Au chip has been studied. Periodic reliefs with the spatial frequency v = (3370 ± 5) line/mm and various depths were formed on the Au film surface using interference lithography and vacuum chalcogenide photoresists. The degree of refractometer sensitivity enhancement and the variation interval of the environment refractive index, Δn, in which this enhancement is observed, are found to depend on the grating relief depth. The interval Δn decreases with the growth of the relief depth, whereas the sensitivity increases from 110 deg/RIU for a standard chip to 154 and 363 deg/RIU for structured chips with relief depths of 11.7 ± 2 and 18.5 ± 2 nm, respectively.

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Published
2018-12-15
How to Cite
Indutnyi, I., Ushenin, Y., Myn’ko, V., Shepeliavyi, P., Lukaniuk, M., Korchovyi, A., & Khrystosenko, R. (2018). Nanostructured Au Chips with Enhanced Sensitivity for Sensors Based on Surface Plasmon Resonance. Ukrainian Journal of Physics, 62(5), 365. https://doi.org/10.15407/ujpe62.05.0365
Section
Optics, lasers, and quantum electronics

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