Spectrum and Optical Contrastivity of an Oxidized Comb-Like Silicon Photonic Crystal
A typical oxidized ternary photonic crystal – A/B/A/C N-periodic structure – is investigated analytically and numerically in the framework of the transfer matrix formalism. The influence of the oxidation on photonic gaps and the positions of perfect reflection areas for (SiO2/Si/SiO2/Air)N structure is calculated with regard for a transformation of the widths of silicon oxide layers. It is shown that the intrinsic optical contrastivity has a non-monotone behavior during the process of oxidation of silicon in the case of p-polarized electromagnetic waves. The found results will allow one to determine the optimal regimes of oxidation to obtain the needed optical properties of a photonic material.
S. John, D. Joannopoulos, S.G. Johnson, J.N. Winn, and R.D.Meade, Photonic Crystals: Molding the Flow of Light (Princeton Univ. Press, Princeton, NJ, 2008).
E. Yablonovich, Phys. Rev. Let. 58, 2059 (1987).
S.K. Awasthi and S.P. Ojha, Progress in Electromagnetics Research 4, 117 (2008).
X.Y. Dai, Y.J. Xiang, and S.C. Wen, Progress in Electromagnetics Research 120, 17 (2011).
E.Ya. Glushko, Opt. Commun. 285, 3133 (2012).
E.Ya. Glushko, Eur. Phys. J. D 66, 36 (2012).
R.C. Jaeger, Thermal Oxidation of Silicon. Introduction to Microelectronic Fabrication (Prentice Hall, Upper Saddle River, 2001).